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Apex 1513 AE Advanced Energy 3156110-005 RF Generator 1.5kW OEM Refurbished img{max-width:100%} Shimadzu EI-D3203MD-A1 Turbomolecular PumpApex 1513 AE Advanced Energy 3156110 005 RF Generator 1. 5kW OEM Refurbished Part No: 0190 19022 Model No: 3156110 005 RF Apex 1513 Input: 3, 208VAC, 50 60Hz Output: 1. 5kW @ 13. 56MHz Manufacturer Refurbished This item is manufacturer refurbished. Includes certificate of conformance. The physical condition is good, but there may be signs of previous use and handling. Sale Details Item Condition: Manufacturer Refurbished, 90 Day Warranty Estimated