HD Systems RH-11D-3001-E100AL Servo Actuator REX Z-Axis Nikon NSR-S307E Working img{max-width:100%} Novellus Systems 03-130015-00 Robot

img{max-width:100%} Novellus Systems 03-130015-00 Robot Interface PCB Rev

img{max-width:100%} Ulvac PST-05A Standard Diode Ion Pump UlvIon Used Working

Other cards work 2-channels without issue

Flange: ISO250

Inventory # A-8868

HD Systems RH-11D-3001-E100AL Servo Actuator REX Z-Axis Nikon NSR-S307E Working img{max-width:100%} Novellus Systems 03-130015-00 RobotHD Systems RH 11D 3001 E100AL Servo Actuator REX Z Axis Nikon NSR S307E Working Part No: RH 11D 3001 E100AL Optical Encoder Part No: ME 02 L 0068512680 Removed from a Nikon NSR S307E 300mm DUV Scanning System Made in Japan This HD Systems RH 11D 3001 E100AL is working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Working Surplus, 90 Day Warranty Estimated Packed Shipping